B. E. Egamberdiev, I. I. Bakhadirov, D.A.Musadjanova, N.A.Musajanova, and M.B.Ostonova. 2024. “Application Of Dielectric And Conductive Epitaxial Films In Silicon Technology”. Journal of Computational Analysis and Applications (JoCAAA) 33 (07):513-19. https://eudoxuspress.com/index.php/pub/article/view/1088.